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Aerotech ALS130H Linear Motor Stage
ALS130H 直线电机平台,拥有亚纳米的分辨率、出众的双向重复定位精度和独特的低速性能,是高性能测试、测量、检查和其它苛刻应用独一无二的解决方案。

行程:  150 mm
重复定位精度: 75 nm
负载: 12.0 kg

 
zPictures/Product_417.jpg   ALS130H 性能指标

Bi-directional repeatability to 75 nm
Direct-drive linear motor for ultra-precise motion
High-accuracy noncontact glass scale linear encoder
Anti-cage creep cross-roller bearings for smooth motion
Outstanding performance in a small footprint
23 N (5.2 lb) continuous force linear servomotor

 

The ALS130H, with its sub-nanometer resolution, superior bi-directional repeatability, and exceptional low-velocity performance, is the unparalleled solution for high performance test, measurement, inspection, and other demanding applications.

Linear Motor Drive
Unlike many stages that utilize a side-drive lead screw, the ALS130H employs a center-driven, non-cogging linear motor as the driving element. Since the linear motor is a direct-drive device, there is no backlash, windup, or "stiction" that is normally associated with a lead screw or ball-screw drive.

The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ALS130H to a peak unloaded acceleration of 1 g and a maximum velocity of 300 mm/s. The result is a high-performance stage with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven stages.

Exceptional Resolution
For alignment applications, outstanding step-to-step resolution is critical. The ALS130H meets this demand with a resolution of 0.5 nm when coupled with Aerotech controls.

The direct-drive linear motor allows the ALS130H to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical. Furthermore, the linear motor and high resolution encoder system also provides excellent in-position stability.

Superior Geometry
Aerotech's ultra-stiff construction and compact two-piece design result in a stage with unmatched geometrical tolerances. As a result, straightness and flatness for the standard stage is <±2 μm over the entire travel.

Smooth Travel
Designed for smooth, vibration-free motion, the ALS130H utilizes precision anti-cage creep cross-roller bearings for outstanding smoothness of motion. Since neither the bearing system nor the drive system utilize any recirculating elements, the ALS130H exhibits the outstanding ripple-free motion required for scanning and inspection applications.

Designed for Long Life
Like all stages in the Aerotech product family, the ALS130H was designed for outstanding long-term performance. Both the linear motor and linear encoder are noncontact devices - they not only exhibit long-life, but are totally maintenance free. A moving magnet track design eliminates the need for cable management, further improving long-term reliability.

Precision Alignment
ALS130H series stages are easily configured as XY assemblies. Options include precision orthogonality alignment to 5 arc seconds and available vertical axis solutions.

Notes:       
1. Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution.       
2. Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements.       
3. Available with Aerotech controllers.       
4. Specifications are for single-axis systems, measured 50 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

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