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Aerotech ALS135 Linear Motor Stage
ALS135 直线电机平台采用了中央驱动,无齿槽直线电机和长寿命的非接触线性编码器。运动磁轨设计消除了运动电缆管理的需要。

行程:200 mm
定位精度:±0.3 µm
负载:12 kg
 

 
zPictures/Product_419.jpg   ALS135 性能指标

Direct-drive linear motor for ultra-precise motion

High-accuracy noncontact linear encoder

Outstanding performance in a small footprint

 

 

The ALS135, with its low profile and outstanding performance characteristics, is the ultimate solution for high-accuracy alignment and inspection stations.

Linear Motor Drive
Unlike many stages that utilize a side-drive lead screw, the ALS135 employs a center-driven, non-cogging linear motor as the driving element. Since the linear motor is a direct-drive device, there is no backlash, windup, or 搒tiction?that is normally associated with a lead screw or ball screw drive.

The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ALS135 to a peak unloaded acceleration of 1 g and a maximum velocity of 300 mm/s. The result is a high-accuracy device with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven stages.

Outstanding Resolution
For alignment applications, outstanding step-to-step resolution is critical. The ALS135 meets this demand with a resolution of 10 nm when coupled with Aerotech controls. The direct-drive linear motor allows the ALS135 to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical.

Superior Geometry
Aerotech's ultra-stiff construction and compact two-piece design results in a stage with unmatched geometrical tolerances. As a result, straightness and flatness for the standard stage is <±2 µm over the entire travel. The effects of Abbe error are nearly eliminated, vastly improving overall system accuracy.

Smooth Travel
Designed for smooth, vibration-free motion, the ALS135 exhibits the outstanding ripple-free motion required for scanning and inspection applications.

Designed for Long Life
Like all stages in the Aerotech product family, the ALS135 was designed for outstanding long-term performance. Both the linear motor and linear encoder are noncontact devices ?they not only exhibit long-life, but are totally maintenance free. A moving magnet track design eliminates the need for cable management, further improving long-term reliability.

Precision Alignment
ALS135 series stages are easily configured as XY assemblies. Options include precision orthogonality alignment to 5 arc seconds and available vertical axis solutions.

Notes:       
1. Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution.       
2. Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements.       
3. Value with Aerotech controls and HAL option.       
4. Specifications are for single-axis systems, measured 50 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

 

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