Available in X, XY, XYZ, and other combinations
2.5 nm linear resolution with Automation 3200
Turnkey drive and control electronics
Noncontact, non-cogging, direct-drive
Ultra-quiet linear servo drives
High speed, real-time axis calibrationcalibration
Aerotech 抯 Nano-Translation (ANT? stages are the best-in-class in combining speed, accuracy, resolution, repeatability, reliability, and size. No other automation tool manufacturer has successfully combined all of these features into a single product designed to meet the rigors of a 24/7 manufacturing environment. The Aerotech Nano-Translation stage series is ready to take your manufacturing alignment or test process to the next level.
Only noncontact direct-drive technology offers the robust, accurate, and high-speed positioning necessary for mass production of precision devices. ANT stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. Aerotech direct-drive technology is high-performance, non-cogging, noncontact, high-speed, high-resolution, and high-accuracy. This unique drive technology offers a significant (several times higher) throughput advantage over conventional screw and piezo-drive-based systems.
Linear and Rotary Solutions
The ANT series consists of both linear and rotary components. The ANT-25L and ANT-50L stages can be mounted flat or on edge for maximum flexibility. ANT-25L/-50L linear stages can be combined with other ANT series (vertical lift, rotary, goniometer) in numerous configurations to create motion platforms tailored to meet specific process requirements.
Outstanding accuracy, position repeatability, and in-position stability require high system resolution. ANT抯 industry-leading resolution ?5 nanometer closed-loop resolution on linear stages, 2 nm resolution for vertical lift stages, and 0.027 arc sec resolution for rotary stages ?provides this high level of performance. Advanced real-time axis calibration systems allow the highest level of system accuracy. High-speed, 32 megahertz electronic circuitry enables extremely fast positioning, over 250 mm per second, even at 5 nanometer resolution. Excellent in-position stability, assisted by high-quality, no-creep linear bearings, enables virtually maintenance-free operation over the life of the product. Aerotech抯 direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.
1. All performance and electrical motor specifications ?0%.
2. Acceleration is payload dependent.
3. Values for single axis stages 25 mm above the table top with Aerotech controls and HAL option.
4. Specifications are for single-axis systems, measured 50 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.