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Aerotech  ALS130系列直线电机运动平台拥有低矮外形和出色的性能,是高精度校正和高精度检测台的理想选择。

  • 交叉滚柱轴承提供平滑运动
  • 行程:25,50,100,150mm
  • 双向重复性:±0.1 µm
  • 定位精度:±0.3 µm
  • 直线度和平面度:±1.0 µm
  • 负载:12.0Kg
 
zPictures/Product_413.jpg   ALS130 性能指标

Bi-directional repeatability to 0.1 micron
Direct-drive linear motor for ultra-precise motion
High-accuracy noncontact linear encoder
Crossed-roller bearings for smooth motion
Outstanding performance in a small footprint

 

The ALS130, with its low profile and outstanding performance characteristics, is the ultimate solution for high-accuracy alignment and inspection stations.

Linear Motor Drive
Unlike many stages that utilize a side-drive lead screw, the ALS130 employs a center-driven, non-cogging linear motor as the driving element. Since the linear motor is a direct-drive device, there is no backlash, windup, or 搒tiction?that is normally associated with a lead screw or ball-screw drive.

The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ALS130 to a peak unloaded acceleration of 1 g and a maximum velocity of 300 mm/s. The result is a high-accuracy device with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven stages.

Outstanding Resolution
For alignment applications, outstanding step-to-step resolution is critical. The ALS130 meets this demand with a resolution of 10 nm when coupled with Aerotech controls. The direct-drive linear motor allows the ALS130 to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical.

Superior Geometry
Aerotech抯 ultra-stiff construction and compact, two-piece design results in a stage with unmatched geometrical tolerances. As a result, straightness and flatness for the standard stage is

Smooth Travel
Designed for smooth, vibration-free motion, the ALS130 utilizes precision crossed-roller bearings for outstanding smoothness of motion. Since neither the bearing system nor the drive system utilize any recirculating elements, the ALS130 exhibits the outstanding ripple-free motion required for scanning and inspection applications.

Designed for Long Life
Like all stages in the Aerotech product family, the ALS130 was designed for outstanding long-term performance. Both the linear motor and linear encoder are noncontact devices, which means they not only exhibit long-life but are totally maintenance free. A moving magnet track design eliminates the need for cable management, further improving long-term reliability.

Precision Alignment
ALS130 series stages are easily configured as XY assemblies. Options include precision orthogonality alignment to 5 arc seconds and available vertical axis solutions.

Notes:     
1. Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution.     
2. Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements.     
3. Available with Aerotech controllers.     
4. Specifications are for single-axis systems, measured 50 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

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