筑造一座桥梁 科技连接世界
首页 > 产品与技术 > 精密定位平台 > 精密转台 > ABRS 系列空气轴承精密直驱转台

Aerotech  ABRS系列空气轴承精密直驱转台提供出色的角度定位,速度稳定性和无误差运动性能,并且拥有非常低矮的外形。
 ★ 直驱无刷无槽伺服电机
 ★ 零齿槽效应带来显著的速度稳定性
 ★ 显著的无误差无抖动运动特性
 ★ 扁平设计的低矮外形
 ★ 直径:128.1-278.1 mm
 ★ 分辨率: 0.036-0.18 arc-sec
 ★ 双向重复性:< 1 arc-sec
 ★ 定位精度:±2 arc-sec

 
zPictures/Product_423.jpg   ABRS 直驱转台性能指标

Direct-drive, slotless brushless servomotor
Zero cogging motor for outstanding velocity stability
Outstanding error motion and wobble performance
Direct coupled, high accuracy rotary encoder
Low profile, planar design
No mechanical contact

 

Aerotech’s ABRS series rotary air-bearing stages provide superior angular positioning, velocity stability, and error motion performance in an exceptionally low-profile package. The ABRS is designed to meet the exacting requirements of wafer inspection, high precision metrology, x-ray diffraction systems, optical inspection and fabrication, and MEMS/nanotechnology device fabrication.

Compact Package
The design of the ABRS series direct-drive rotary stage has been optimized to minimize stage height. The low profile of the stage reduces the effective working height of the system, minimizing “stack-up” related errors. In addition to the low overall height, the ABRS series provides a clear aperture that can be used for product feed-through, laser beam delivery, cable clearance, or application-specific requirements.

Superior Mechanical Design
The ABRS design features large air-bearing surfaces for high stiffness and load capacity, producing not only excellent axial and radial error motions, but outstanding tilt error motion, as well. The resultant face error motion is significantly better than other rotary air-bearing tables and spindles, greatly benefiting applications requiring exceptional planar performance.

Brushless Direct-Drive
To maximize positioning performance, the ABRS series utilizes Aerotech’s S-series slotless, brushless motor. The motor uses an advanced magnetic circuit design to produce high torque output with minimal heat generation. The slotless design is inherently zero-cogging and torque ripple-free. This makes the ABRS stages ideal for applications requiring smooth scan velocities at low or high speeds.

Accurate Positioning
An optical encoder is standard with the ABRS. When coupled with Aerotech’s feedback multipliers and controls, resolutions of <0.03 arc second are achievable.

Custom Designs
Custom versions of the ABRS are available for rate table and inertial guidance test-stand applications.

Notes:     
1. Maximum resolution presumes A3200 controller using MXH500 multiplication, and accounts for controller quadrature.     
2. Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution.     
3. Maximum loads are mutually exclusive.     
4. All error motion specifications measured at 60 rpm.     
5. To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller is recommended.     
6. Air supply must be clean, dry to 0° F dew point, and filtered to 0.25 μm or better. Recommend nitrogen at 99.9% purity.

 

版权所有 © 2012-2015 北京奥控科技有限公司
京ICP备13029215号-1
A-CON is a motion control, positioning and automation systems integrator.

地址:北京市昌平区立汤路188号北方明珠大厦1号楼2319室
电话:+86 010-57798807 邮箱:service@aconmc.com 
奥控科技官方微博 北京奥控科技
关闭
010-57798807 工作日:9:00-18:00
周 六:9:00-18:00
点击这里给我发消息