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AirBeamTM 系列空气轴承直线电机平台是Computer-To-Plate 系统、绘图仪、晶片扫描系统和工厂自动化应用的理想选择。

  • 高速直线电机驱动
  • Clog-free空气轴承技术 
  • 行程:305mm和610mm
  • 定位精度:10 µm 和12 µm
  • 双向重复性:±1个计数
  • 平面度和直线度:2µm
 
zPictures/Product_437.jpg   AirBeam 定位平台性能

AirBeam Single Axis Shuttlle
◆ Ultra-smooth - ideal for scanning applications
◆ Virtually unlimited service life without particle generation
◆ High speed linear motor
◆ Air bearing accuracy
◆ Internal cables
◆ Clog-free air bearing technology

 

Linear Motor Air Bearing Stage
The AirBeam Series is ideal for Computer-To-Plate systems, photoplotters, wafer scanning systems, and factory automation applications. It provides straight, stiff, cog-free motion at resolutions less than a micron. The AirBeam combines breakthrough linear servo motor technology and an ultrasmooth air bearing way in a single structural beam. The linear motor and modular, serviceable moving cable set are uniquely mounted inside the main beam, minimizing particulate generation. The integral linear motor allows carriage speeds up to 1 meter per second, and accelerations up to 1 G. The linear encoder mounts just below the upper surface, minimizing Abbé error. A laser interferometer option is available for particularly demanding OEM applications with resolution down to 2.5 nanometers. Since the air bearing carriage, linear motor, and linear encoder are non-contact devices, the AirBeam provides virtually unlimited life without particle generation.

Danaher Motion-Dover's unique clog-free air bearing technology provides superior reliability while eliminating costly filtration requirements, and requires minimal air consumption. The AirBeam series mounts via 3 points, eliminating degradation of positioning accuracy due to imperfect mounting surfaces. Locking, D sub-mini connectors with strain-relieved cables mount on the box beam end plate to provide convenient access to motor and limit/encoder signals. An auxiliary connector is provided for user signals, and terminates on the air bearing moving carriage. Please contact one of our Applications Engineers when high stability is needed. An optional solenoid may be added which rapidly disables compressed air to the moving carriage, resulting in a "Coulomb welded" state. In this state, motion between the spar and carriage is eliminated at the atomic level, and the only relative movement is due to thermal phenomena.

 

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